Raith_GDSII MATLAB Toolbox documentation

This toolbox enables the creation of patterns for Raith electron-beam lithography and focused ion beam tools using MATLAB. It can also be used to create standard GDSII files for arbitrary lithography appplications.

The Raith_GDSII MATLAB Toolbox is currently maintained by the University of Alberta nanoFAB Centre.[1] Please refer to the GitHub repository for the source code and installation details.

Features

• Generate Raith-dialect GDSII hierarchy (.csf) and positionlist (.pls) files directly within MATLAB

• Plot patterns in MATLAB using Raith dose factor colouration, from individual GDSII elements to entire positionlists

• Full support for Raith curved elements (circles, ellipses, arcs)

• Full support for Raith “fixed beam moving stage” exposure elements (paths and circles)

• Simply connected font defined to use for text elements

• Export pattern in plain GDSII (.gds), where Raith-specific elements are converted to polygons and paths, to use with non-Raith GDSII editors

Table of Contents

• 1. Introduction
  • 1.1. The Raith_GDSII classes
  • 1.2. Software use and bug reporting
  • 1.3. Citing Raith_GDSII
  • 1.4. Installation
• 2. Quick-start guide
• 3. The Raith_element class
  • 3.1. Properties
  • 3.2. Constructors
  • 3.3. Methods
• 4. The Raith_structure class
  • 4.1. Properties
  • 4.2. Constructor
  • 4.3. Methods
• 5. The Raith_library class
  • 5.1. Properties
  • 5.2. Constructor
  • 5.3. Methods
  • 5.4. Static methods
• 6. The Raith_positionlist class
  • 6.1. Properties
  • 6.2. Constructor
  • 6.3. Methods
• 7. Extended techniques
  • 7.1. Disabling data checking
  • 7.2. Defining patterns using MATLAB structures
  • 7.3. “On-the-fly” GDSII writing

Indices and tables

• Index

• Search Page

[1]

Versions 1.1 and earlier were developed at the (former) National Institute for Nanotechnology, a joint initiative between the University of Alberta, the Government of Canada, the Government of Alberta, and the National Research Council Canada.